Low-cost PDMS seal ring for single-side wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1998
- Sensors and Actuators, A: Physical
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20 results for Juergen Brugger
Piezoresistive cantilever designed for torque magnetometry
- M. Willemin
- C. Rossel
- et al.
- 1998
- Journal of Applied Physics
Microfabrication and parallel operation of 5×5 2D AFM cantilever arrays for data storage and imaging
- M.I. Lutwyche
- C. Andreoli
- et al.
- 1998
- MEMS 1998
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS
- H. Lorenz
- M. Despont
- et al.
- 1998
- Sensors and Actuators, A: Physical
Characterization of an integrated force sensor based on a MOS transistor for applications in scanning force microscopy
- Terunobu Akiyama
- Andreas Tonin
- et al.
- 1998
- Sensors and Actuators, A: Physical
Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry
- J. Brugger
- M. Willemin
- et al.
- 1997
- TRANSDUCERS 1997
High-yield wafer chuck for single-sided wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- TRANSDUCERS 1997
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
- M. Despont
- H. Lorenz
- et al.
- 1997
- MEMS 1997
Silicon micro/nanomechanical device fabrication based on focused ion beam surface modification and KOH etching
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- Microelectronic Engineering
Scanning force microscopy in the dynamic mode using microfabricated capacitive sensors
- N. Blanc
- J. Brugger
- et al.
- 1996
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures