Effects of ultraviolet and vacuum ultraviolet synchrotron radiation on organic underlayers to modulate line-edge roughness of fine-pitch poly-silicon patterns
- Hiroyuki Miyazoe
- Sebastian U. Engelmann
- et al.
- 2017
- JVSTA
Publications
Date
Featured collections
Popular topics
3 results for Jason L. Lauer
The effects of vacuum ultraviolet radiation on low-k dielectric films
- H. Sinha
- H. Ren
- et al.
- 2012
- Journal of Applied Physics
Reflectance and substrate currents of dielectric layers under vacuum ultraviolet irradiation
- H. Sinha
- D.B. Straight
- et al.
- 2010
- JVSTA