Publications

2 results for Chris Cole

In-depth feasibility study of extreme ultraviolet damascene extension: Patterning, dielectric etch, and metallization
- - Xinghua Sun
  - Yann Mignot
  - et al.
- 2022
- Journal of Vacuum Science and Technology B
Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features
- - A. Dutta
  - Jennifer Church
  - et al.
- 2020
- SPIE Advanced Lithography 2020