DSA via hole shrink for advanced node applications
- Cheng Chi
- Chi Chun Liu
- et al.
- 2016
- SPIE Advanced Lithography 2016
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3 results for Ekmini Anuja Desilva
Direct Write 3-dimensional nanopatterning using probes
- Armin Knoll
- Felix Holzner
- et al.
- 2010
- FNANO 2010
Direct write 3-dimensional nanopatterning using probes
- David Pires
- Armin Knoll
- et al.
- 2010
- SPIE Advanced Lithography 2010