Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication
- Narender Rana
- Yunlin Zhang
- et al.
- 2015
- ASMC 2015
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7 results for Bachir Dirahoui
Machine learning and predictive data analytics enabling metrology and process control in IC fabrication
- Narender Rana
- Yunlin Zhang
- et al.
- 2015
- SPIE Advanced Lithography 2015
High performance 32nm SOI CMOS with high-k/metal gate and 0.149μm 2 SRAM and ultra low-k back end with eleven levels of copper
- B. Greene
- Q. Liang
- et al.
- 2009
- VLSI Technology 2009
RTA-driven intra-die variations in stage delay, and parametric sensitivities for 65nm technology
- I. Ahsan
- N. Zamdmer
- et al.
- 2006
- VLSI Technology 2006
Characterization of Across-device Linewidth Variation (ADLV) for 65 nm logic SRAM using CDSEM and linewidth roughness algorithms
- W. Chu
- C. Radens
- et al.
- 2006
- SPIE Advanced Lithography 2006
High performance 65 nm SOI technology with dual stress liner and low capacitance SRAM cell
- E. Leobandung
- H. Nayakama
- et al.
- 2005
- VLSI Technology 2005
Application of E-beam hot spot inspection for early detection of systematic patterning problems to a FinFET technology
- Deborah A. Ryan
- Oliver D. Patterson
- et al.
- 2015
- J. Micro/Nanolithogr. MEMS MOEMS