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Geoffrey W. Burr- G.W. Burr
- K. Virwani
- et al.
- 2012
- VLSI Technology 2012
- R.S. Shenoy
- K. Gopalakrishnan
- et al.
- 2011
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- et al.
- 2011
- Proceedings of SPIE - The International Society for Optical Engineering 2011
- K. Gopalakrishnan
- R.S. Shenoy
- et al.
- 2010
- VLSI Technology 2010
- David Melville
- Alan E. Rosenbluth
- et al.
- 2010
- SPIE Advanced Lithography 2010
- 2009
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- John Bruley
- Geoffrey Burr
- et al.
- 2009
- SPIE Advanced Lithography 2009
- Kafai Lai
- Alan E. Rosenbluth
- et al.
- 2009
- SPIE Advanced Lithography 2009
- Yi-Chou Chen
- Yuyu Lin
- et al.
- 2008
- ICSICT 2008
- B. Rajendran
- M.H. Lee
- et al.
- 2008
- VLSI Technology 2008