Integration of a manufacturing grade, k = 2.0 spin-on material in a single damascene structure
- Willi Volksen
- Sampath Purushothaman
- et al.
- 2012
- ECS J. Solid State Sci. Technol.
Publications
Date
Featured collections
Popular topics
21 results for Leslie E. Krupp
Breakthrough reduction of low-k damage with cryoplasma ashing
- Francesca Iacopi
- Jai Hyuk Choi
- et al.
- 2010
- ADMETA 2010
Application of block-copolymer supramolecular assembly for the fabrication of complex TiO2 nanostructures
- Sung Ho Kim
- Oun-Ho Park
- et al.
- 2008
- Small
Phase change nanodots patterning using a self-assembled polymer lithography and crystallization analysis
- Yuan Zhang
- Simone Raoux
- et al.
- 2008
- Journal of Applied Physics
Crystallization characteristics of phase change nanoparticle arrays fabricated by self-assembly based lithography
- Yuan Zhang
- Simone Raoux
- et al.
- 2008
- MRS Spring Meeting 2008
High-aspect-ratio cylindrical nanopore arrays and their use for templating titania nanoposts
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2008
- Advanced Materials
Photopatternable nanoporous titania films by coassembly of diblock copolymer and chemically modified titanium alkoxide
- Oun-Ho Park
- Joy Y. Cheng
- et al.
- 2007
- ACS National Meeting 2007
Phase change nanodot arrays fabricated using a self-assembly diblock copolymer approach
- Yuan Zhang
- H.-S. Philip Wong
- et al.
- 2007
- Applied Physics Letters
Biomimetic approaches for fabricating high-density nanopatterned arrays
- Jennifer N. Cha
- Yuan Zhang
- et al.
- 2007
- Chemistry of Materials
Patterning ∼20 nm half-pitch lines on silicon using a self-assembled organosilicate etch mask
- Linnea Sundström
- Leslie Krupp
- et al.
- 2006
- Applied Physics Letters