Effect of elevated implant temperature on amorphization and activation in as-implanted silicon-on-insulator layers
- Katherine L. Saenger
- Stephen W. Bedell
- et al.
- 2008
- MRS Spring Meeting 2008
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6 results for Donald Wall
Predictive data analytics and machine learning enabling metrology and process control for advanced node IC fabrication
- Narender Rana
- Yunlin Zhang
- et al.
- 2015
- ASMC 2015
Machine learning and predictive data analytics enabling metrology and process control in IC fabrication
- Narender Rana
- Yunlin Zhang
- et al.
- 2015
- SPIE Advanced Lithography 2015
Modifications of growth of strained silicon and dopant activation in silicon by cryogenic ion implantation and recrystallization annealing
- Hiroshi Itokawa
- Nathaniel C. Beriiner
- et al.
- 2012
- IWJT 2012
Advanced junction formation for Sub-32nm logic devices
- Sadanand V. Deshpande
- Ahmet Ozcan
- et al.
- 2010
- IWJT 2010
Effects of temperature dependent pre-amorphization implantation on NiPt silicide formation and thermal stability on Si(100)
- Ahmet S. Ozcan
- Donald Wall
- et al.
- 2013
- Applied Physics Letters