Photonic Metacrystal: Design and Experimental Results
- S. Hu
- Marwan H. Khater
- et al.
- 2022
- CLEO 2022
Publications
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108 results for Sebastian Engelmann
Effect of surface temperature on GeSbTe damage formation during plasma processing
- L. Buzi
- J. M. Papalia
- et al.
- 2021
- SPIE Advanced Lithography 2021
Hydrocarbon layer formation and removal studies on SiN films etched in halogen/hydrofluorocarbon plasmas
- L. Buzi
- J. M. Papalia
- et al.
- 2020
- SPIE Advanced Lithography 2020
Silicon Photonic Gas Sensing
- William M. J. Green
- Eric J. Zhang
- et al.
- 2019
- OFC 2019
Compliant Polymer Interface Demonstration with Standard Plug-In Connection to Fiber Cables
- Tymon Barwicz
- Kengo Watanabe
- et al.
- 2018
- IPC 2018
Localization and quantification of trace-gas fugitive emissions using a portable optical spectrometer
- Eric J. Zhang
- Chu C. Teng
- et al.
- 2018
- SPIE DCS 2018
Towards co-packaging of photonics and microelectronics in existing manufacturing facilities
- Alexander Janta-Polczynski
- Elaine Cyr
- et al.
- 2018
- SPIE OPTO 2018
Bowtie photonic crystal with deep subwavelength mode confinement in a dielectric material
- Shuren Hu
- Marwan Khater
- et al.
- 2017
- CLEO 2017
High performance and record subthreshold swing demonstration in scaled RMG SiGe FinFETs with high-Ge-content channels formed by 3D condensation and a novel gate stack process
- Pouya Hashemi
- Takashi Ando
- et al.
- 2017
- VLSI Technology 2017
High performance PMOS with strained high-Ge-content SiGe fins for advanced logic applications
- Pouya Hashemi
- Takashi Ando
- et al.
- 2017
- VLSI-TSA 2017