Plasma Activated Low-temperature Die-level Direct Bonding with Advanced Wafer Dicing Technologies for 3D Heterogeneous IntegrationKatsuyuki SakumaDishit Parekhet al.2021ECTC 2021
3D Die-Stack on Substrate (3D-DSS) Packaging Technology and FEM Analysis for 55um-75um Mixed Pitch Interconnections on High Density Laminate Katsuyuki SakumaMukta Farooqet al.2021ECTC 2021