Control of surface oxide formation in plasma-enhanced quasiatomic layer etching of tantalum nitride
- Nathan Marchack
- Jon L. Innocent-Dolor
- et al.
- 2020
- JVSTA
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79 results for Marinus Hopstaken
Annealing and impurity effects in co thin films for MOL Contact and BEOL metallization
- James Kelly
- Vimal Kamineni
- et al.
- 2018
- JES
Patching of Lattice Defects in Two-Dimensional Diffusion Barriers
- Damon B. Farmer
- Priscilla D. Antunez
- et al.
- 2018
- ACS Applied Nano Materials
Analysis of loss mechanisms in Ag2ZnSnSe4 Schottky barrier photovoltaics
- Talia S. Gershon
- Oki Gunawan
- et al.
- 2017
- Journal of Applied Physics
Effects of the incorporation of alkali elements on Cu(In,Ga)Se2 thin film solar cells
- Donghyeop Shin
- Jekyung Kim
- et al.
- 2016
- Sol Energ Mater Sol Cells
SIMS measurement of hydrogen and deuterium detection limits in silicon: Comparison of different SIMS instrumentation
- F.A. Stevie
- Chaunzhen Zhou
- et al.
- 2016
- JVSTB
Atomic Layer Deposited Aluminum Oxide for Interface Passivation of Cu2ZnSn(S,Se)4 Thin-Film Solar Cells
- Yun Seog Lee
- Talia S. Gershon
- et al.
- 2016
- Advanced Energy Materials
Photovoltaic materials and devices based on the alloyed kesterite absorber (AgxCu1-x)2ZnSnSe4
- Talia S. Gershon
- Yun Seog Lee
- et al.
- 2016
- Advanced Energy Materials
Chemical Consequences of Alkali Inhomogeneity in Cu2ZnSnS4 Thin-Film Solar Cells
- Talia S. Gershon
- Cayla Hamann
- et al.
- 2015
- Advanced Energy Materials
Tin incorporated in copper films during damascene copper electrodeposition
- S. Kitayaporn
- Qiang Huang
- et al.
- 2014
- JES