Dual-cantilever AFM probe for combining fast and coarse imaging with high-resolution imaging
- M. Despont
- H. Takahashi
- et al.
- 2000
- MEMS 2000
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113 results for Michel Despont
VLSI-NEMS chip for AFM data storage
- M. Despont
- J. Brugger
- et al.
- 1999
- MEMS 1999
Nanomechanical nose
- H.P. Lang
- M.K. Baller
- et al.
- 1999
- MEMS 1999
High-yield wafer chuck for single-sided wet etching of MEMS structures
- J. Brugger
- G. Beljakovic
- et al.
- 1997
- TRANSDUCERS 1997
High-aspect-ratio, ultrathick, negative-tone near-UV photoresist for MEMS applications
- M. Despont
- H. Lorenz
- et al.
- 1997
- MEMS 1997
A chemical sensor based on amicromechanical cantilever array for the identification of gases and vapors
- H.P. Lang
- R. Berger
- et al.
- 1998
- Applied Physics A: Materials Science and Processing
Two steps micromoulding and photopolymer high-aspect ratio structuring for applications in piezoelectric motor components
- L. Dellmann
- S. Roth
- et al.
- 1998
- Microsystem Technologies
Fabrication of photoplastic high-aspect ratio microparts and micromolds usina SU-8 UV resist
- H. Lorenz
- M. Despont
- et al.
- 1998
- Microsystem Technologies
Wide bandwidth room-temperature THz imaging array based on antenna-coupled MOSFET bolometer
- Thomas Morf
- Bernhard Klein
- et al.
- 2014
- Sensors and Actuators, A: Physical
Thermal probe maskless lithography for 27.5 nm half-pitch Si technology
- Lin Lee Cheong
- Philip Paul
- et al.
- 2013
- Nano Letters