A mass-balanced through-wafer electrostatic x/y-scanner for probe data storage
- J.B.C. Engelen
- H. Rothuizen
- et al.
- 2009
- Microelectronic Engineering
Publications
Date
Featured collections
Popular topics
113 results for Michel Despont
Encapsulated tips for reliable nanoscale conduction in scanning probe technologies
- Harish Bhaskaran
- Abu Sebastian
- et al.
- 2009
- Nanotechnology
Nanoscale PtSi tips for conducting probe technologies
- Harish Bhaskaran
- Abu Sebastian
- et al.
- 2009
- IEEE TNANO
Cryogenic current-in-plane tunneling apparatus
- Nicolas Weiss
- Ute Drechsler
- et al.
- 2008
- Review of Scientific Instruments
Probe-based ultrahigh-density storage technology
- 2008
- IBM J. Res. Dev
Controlled thermophoresis as an actuation mechanism for noncantilevered MEMS devices
- Brend Gotsmann
- Michel Despont
- et al.
- 2008
- JMEMS
Low-cost AFM cantilever manufacturing technology
- Roland Guerre
- Ute Drechsler
- et al.
- 2008
- JMM
Analyzing refractive index changes and differential bending in microcantilever arrays
- Fraņois Huber
- Hans Peter Lang
- et al.
- 2008
- Review of Scientific Instruments
Transfer bonding technology for batch fabrication of SMA microactuators
- T. Grund
- R. Guerre
- et al.
- 2008
- European Physical Journal: Special Topics
Selective transfer technology for microdevice distribution
- Roland Guerre
- Ute Drechsler
- et al.
- 2008
- JMEMS