Rapid, accurate improvement in 3D mask representation via input geometry optimization and crosstalk
- David Fryer
- Michael Lam
- et al.
- 2014
- SPIE Advanced Lithography 2014
Publications
Date
Featured collections
Popular topics
2 results for Changan Wang
Benchmarking study of 3D mask modeling for 2 and 1x nodes
- Chang An Wang
- Chao-Chun Liang
- et al.
- 2013
- SPIE Advanced Lithography 2013