PVD prepared molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2016
- SPIE Advanced Lithography 2016
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22 results for Colin D. Rawlings
Thermal probe nanolithography for novel photonic devices
- Felix Holzner
- Philip Paul
- et al.
- 2015
- IPRSN 2015
Accurate Location and Manipulation of Nanoscaled Objects Buried under Spin-Coated Films
- Colin D. Rawlings
- Heiko Wolf
- et al.
- 2015
- ACS Nano
Precision positioning for thermal scanning probe lithography
- Philip Paul
- Simon Züst
- et al.
- 2015
- EUSPEN 2015
Adhesion and friction in mesoscopic graphite contacts
- Elad Koren
- Emanuel Lörtscher
- et al.
- 2015
- Science
Sub-20 nm silicon patterning and metal lift-off using thermal scanning probe lithography
- Heiko Wolf
- Colin D. Rawlings
- et al.
- 2015
- JVSTB
Tailored molecular glass resists for scanning probe lithography
- Christian Neuber
- Hans-Werner Schmidt
- et al.
- 2015
- SPIE Advanced Lithography 2015
Nanometer accurate markerless pattern overlay using thermal scanning probe lithography
- Colin Rawlings
- Urs Duerig
- et al.
- 2014
- IEEE TNANO
Nanometer control of the markerless overlay process using thermal scanning probe lithography
- Colin Rawlings
- Urs Duerig
- et al.
- 2014
- AIM 2014
Closed-loop high-speed 3D thermal probe nanolithography
- Armin W. Knoll
- Michal Zientek
- et al.
- 2014
- SPIE Advanced Lithography 2014