Effect of germanium concentration on the dielectric function of strained Si 1-xGe x films
- Manasa Medikonda
- Gangadhara R. Muthinti
- et al.
- 2012
- ISTDM 2012
Publications
Date
Featured collections
Popular topics
14 results for Alain C. Diebold
X-ray scattering methods for porosity metrology of low-k thin films
- C.M. Settens
- V.K. Kamineni
- et al.
- 2009
- FCMN 2009
Spectroscopic ellipsometry of porous low-κ dielectric thin films
- V.K. Kamineni
- C.M. Settens
- et al.
- 2009
- FCMN 2009
Applications of image diagnostics to metrology quality assurance and process control
- John A. Allgair
- Victor V. Boksha
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003