Unexpected impact of RIE gases on lithographic films
- Martin Glodde
- Robert L. Bruce
- et al.
- 2017
- SPIE Advanced Lithography 2017
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3 results for Michael Saccomanno
Atomic layer epitaxy of InAs with high silicon doping concentration
- Doron Cohen Elias
- Guy Cohen
- et al.
- 2020
- JVSTA
SIMS measurement of hydrogen and deuterium detection limits in silicon: Comparison of different SIMS instrumentation
- F.A. Stevie
- Chaunzhen Zhou
- et al.
- 2016
- JVSTB