Applicability of global source mask optimization to 22/20nm node and beyond
- Kehan Tian
- Moutaz Fakhry
- et al.
- 2011
- SPIE Advanced Lithography 2011
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Multistep adsorption of perfluoropolyether hard-disk lubricants onto amorphous carbon substrates from solution
- Larry E. Bailey
- Kay K. Kanazawa
- et al.
- 2001
- Langmuir