Publications

2 results for Johann Foucher

Reconciling measurements in AFM reference metrology when using different probing techniques
- - Narender Rana
  - Charles Archie
  - et al.
- 2011
- SPIE Advanced Lithography 2011
3D-AFM enhancement for CD metrology dedicated to lithography sub-28-nm node requirements
- - Johann Foucher
  - Narender Rana
  - et al.
- 2010
- SPIE Advanced Lithography 2010