Gas source depletion study of high-order silanes of silicon-based epitaxial layers grown with RPCVD and low temperatures
- Keith Chung
- Paul Brabant
- et al.
- 2012
- ECS Meeting 2012
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4 results for Keith Chung
Thermal budget reduction and throughput enhancement for CMOS Epi stressors via wet clean interface contamination evaluation and control
- Paul Brabant
- Keith Chung
- et al.
- 2011
- ASMC 2011
High strain embedded-SiGe via low temperature reduced pressure chemical vapor deposition
- Hong He
- Paul Brabant
- et al.
- 2012
- Thin Solid Films
Gas phase particle formation and elimination on Si (100) in low temperature reduced pressure chemical vapor deposition silicon-based epitaxial layers
- Manabu Shinriki
- Keith Chung
- et al.
- 2012
- Thin Solid Films