Fabrication of metal gated FinFETs through complete gate silicidation with Ni
- Jakub Kedzierski
- Meikei Ieong
- et al.
- 2004
- IEEE Transactions on Electron Devices
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Extension and source/drain design for high-performance FinFET devices
- Jakub Kedzierski
- Meikei Ieong
- et al.
- 2003
- IEEE Transactions on Electron Devices