Publications

2 results for Ritwik Chatterjee

Rigorous electrical modeling of through silicon vias (TSVs) with MOS capacitance effects
- - Tapobrata Bandyopadhyay
  - Ki Jin Han
  - et al.
- 2011
- IEEE Transactions on CPMT
Characterization of iodoheptafluoropropane as a dielectric etchant. I. Process performance evaluation
- - Simon Karecki
  - Ritwik Chatterjee
  - et al.
- 2001
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures