Stress liner proximity technique to enhance carrier mobility in high-κ metal gate MOSFETsDechao GuoKathryn Schonenberget al.2009MRS Fall Meeting 2009
Competitive and cost effective high-k based 28nm CMOS technology for low power applicationsF. ArnaudA. Theanet al.2009IEDM 2009
32nm general purpose bulk CMOS technology for high performance applications at low voltageF. ArnaudJ. Liuet al.2008IEDM 2008
A cost effective 32nm high-K/metal gate CMOS technology for low power applications with single-metal/gate-first processX. ChenS. Samavedamet al.2008VLSI Technology 2008