Reduction of the C54-TiSi2 phase transformation temperature using refractory metal ion implantation
- R. Mann
- G.L. Miles
- et al.
- 1995
- Applied Physics Letters
Publications
159 results for F.M. D'Heurle
Theoretical considerations about phase growth and phase formation
- F.M. D'Heurle
- 1995
- MRS Fall Meeting 1995
Kinetic studies of intermetallic compound formation by resistance measurements
- S.-L. Zhang
- F.M. d'Heurle
- 1995
- Thin Solid Films
Thermal stability of silicide on polycrystalline Si
- Q.Z. Hong
- Stella Q. Hong
- et al.
- 1994
- Thin Solid Films
Investigating the role of grain boundaries in interface reactions
- F.M. d'Heurle
- P. Gas
- et al.
- 1994
- MRS Spring Meeting 1994
Stresses and morphological instabilities in silicide/polycrystalline Si layered structures
- Q.Z. Hong
- F.M. D'Heurle
- et al.
- 1993
- Applied Physics Letters
Formation of a C49 TiGe2 phase during annealing a coevaporated Ti0.33Ge0.67 alloy
- Q.Z. Hong
- K. Barmak
- et al.
- 1993
- Applied Physics Letters
Phase formations in the copper-germanium system: Reactions, structures and resistivities
- F.M. d'Heurle
- J. Gupta
- 1993
- Applied Surface Science
Formation of silicide thin films by solid state reaction
- P. Gas
- F.M. d'Heurle
- 1993
- Applied Surface Science
Diffusion of elements implanted in amorphous titanium disilicide
- F.M. d'Heurle
- J.M. Cotte
- et al.
- 1993
- Applied Surface Science