Positron annihilation studies in the field induced depletion regions of metal-oxide-semiconductor structures
- P. Asoka-Kumar
- T.C. Leung
- et al.
- 1992
- Journal of Applied Physics
Publications
Date
Featured collections
Popular topics
72 results for G.W. Rubloff
Anomalous diffusion of fluorine in silicon
- S.-P. Jeng
- T.P. Ma
- et al.
- 1992
- Applied Physics Letters
Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CFx at the Al/Si interface
- G. Tas
- R.J. Stoner
- et al.
- 1992
- Applied Physics Letters
Nondestructive detection of titanium disilicide phase transformation by picosecond ultrasonics
- H.-N. Lin
- R.J. Stoner
- et al.
- 1992
- Applied Physics Letters
Kinetics of nucleation and growth of Si on SiO2 in very low pressure SiH4 chemical vapor deposition
- S.S. Dana
- M. Liehr
- et al.
- 1992
- Applied Physics Letters
Centroid shift of γ rays from positron annihilation in the depletion region of metal-oxide-semiconductor structures
- T.C. Leung
- Y. Kong
- et al.
- 1991
- Applied Physics Letters
SiO2/Si interface properties using positrons
- P. Asoka-Kumar
- K.G. Lynn
- et al.
- 1991
- Physical Review B
Surface etching and roughening in integrated processing of thermal oxides
- M. Offenberg
- M. liehr
- et al.
- 1991
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Ultraclean, integrated processing of thermal oxide structures
- M. Offenberg
- M. Liehr
- et al.
- 1990
- Applied Physics Letters
Role of surface passivation in the integrated processing of MOS structures
- M. Offenberg
- M. Liehr
- et al.
- 1990
- VLSI Technology 1990