Publications

168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Chemically amplified resist processing with top coats for deep-ultraviolet and e-beam applications
- - Karen Petrillo
  - James Bucchignano
  - et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Current oscillations in thin metal-oxide-semiconductor structures observed by ballistic electron emission microscopy
- - H.J. Wen
  - R. Ludeke
  - et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Experimental demonstration of the validity of accelerated radiation damage testing of x-ray mask materials
- - R.E. Acosta
  - R. Rippstein
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fabrication of electron beam generated, chirped, phase mask (1070.11-1070.66 nm) for fiber Bragg grating dispersion compensator
- - R.C. Tiberio
  - D.W. Carr
  - et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Directional copper deposition using dc magnetron self-sputtering
- - Zbigniew J. Radzimski
  - Witold M. Posadowski
  - et al.
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Comparison of secondary ion mass spectrometry profiling of sub-100 nm ultrashallow junctions using NO⁺₂ and O⁺₂ sputtering
- - P.A. Ronsheim
  - K.L. Lee
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Directional and ionized physical vapor deposition for microelectronics applications
- - S.M. Rossnagel
- 1998
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Investigation of existing defects and defect generation in device-grade SiO₂ by ballistic electron emission spectroscopy
- - H.J. Wen
  - R. Ludeke
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Electromigration behavior of hot-sputtered Al(Cu) versus chemical vapor deposition W vias
- - R. Filippi
  - E.N. Levine
  - et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Conductive polyaniline: Applications in x-ray mask making
- - M.S. Lawliss
  - J.M. Rocque
  - et al.
- 1997
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures