Publications

20 results at MRS Proceedings 2002

Low temperature metal organic chemical vapor deposition of aluminum oxide thin films for advanced CMOS gate dielectric applications
- - Spyridon Skordas
  - Filippos Papadatos
  - et al.
- 2002
- MRS Proceedings 2002
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
- - A. Grill
  - V.V. Patel
  - et al.
- 2002
- MRS Proceedings 2002
Texture and resistivity of Cu and dilute Cu alloy films
- - K. Barmak
  - A. Gungor
  - et al.
- 2002
- MRS Proceedings 2002
In-situ studies of silicide formation in Ti-Ta bilayer thin films on poly-Si
- - A.S. Özcan
  - K.F. Ludwig Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Terabit density cobalt nanowire arrays with tunable magnetic properties
- - Andrei Ursache
  - Mustafa Bal
  - et al.
- 2002
- MRS Proceedings 2002
Pyrene fluorescence as a molecular probe of miscibility in organic/inorganic hybrid nanocomposites suitable for microelectronic applications
- - Q.R. Huang
  - David Mecerreyes
  - et al.
- 2002
- MRS Proceedings 2002
The growth of tantalum thin films by plasma-enhanced atomic layer deposition and diffusion barrier properties
- - H. Kim
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Cu and dilute binary Cu(Ti), Cu(Sn) and Cu(Al) thin films: Texture, grain growth and resistivity
- - A. Gungor
  - K. Barmak
  - et al.
- 2002
- MRS Proceedings 2002
A self-aligned silicide process utilizing ion implants for reduced silicon consumption and control of the silicide formation temperature
- - G.M. Cohen
  - C. Cabral Jr.
  - et al.
- 2002
- MRS Proceedings 2002
Crystallographic texture and phase metrology during damascene copper processing
- - K.J. Kozaczek
  - P. DeHaven
  - et al.
- 2002
- MRS Proceedings 2002