Manufacturability versus reliability issues relevant to interconnect metallizations
- K.P. Rodbell
- E.G. Colgan
- et al.
- 1994
- MRS Spring Meeting 1994
Publications
15 results at MRS Spring Meeting 1994
HCP-FCC phase transition in Co-Ni alloys studied with magneto-optical Kerr spectroscopy
- A. Carl
- D. Weller
- et al.
- 1994
- MRS Spring Meeting 1994
Progress in large area selective silicon deposition for TFT/LCD applications
- Jun H. Souk
- Gregory N. Parsons
- 1994
- MRS Spring Meeting 1994
Photobleaching of PL and temperature dependence of ESR in nitrogen-rich amorphous silicon nitride films
- D. Chen
- J.M. Viner
- et al.
- 1994
- MRS Spring Meeting 1994
High performance metallization issues for ULSI
- R. Rosenberg
- 1994
- MRS Spring Meeting 1994