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168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Engineering crystallinity of atomic layer deposited gate stacks containing ultrathin HfO₂and a Ti-based metal gate: Effects of postmetal gate anneal and integration schemes
- - Steven Consiglio
  - Kandabara Tapily
  - et al.
- 2014
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Dot-matrix marks for dynamic overlay measurements in electron beam lithography
- - Ernst Kratschmer
  - James J. Bucchignano
  - et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thin film Ni-Si solid-state reactions: Phase formation sequence on amorphized Si
- - Pierre Turcotte-Tremblay
  - Matthieu Guihard
  - et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Feature profile evolution during shallow trench isolation etching in chlorine-based plasmas. III. the effect of oxygen addition
- - Cheng-Che Hsu
  - Nathan Marchack
  - et al.
- 2013
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Image processing using shape recognition for alignment to damaged registration marks in electron beam lithography
- - E. Kratschmer
  - D.P. Klaus
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Hydrogen silsesquioxane-based hybrid electron beam and optical lithography for high density circuit prototyping
- - M. Guillorn
  - J. Chang
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Quantification of outgassing of C-, Si-, and S-containing products during exposure of photoresists
- - F.A. Houle
  - N. Maxim
  - et al.
- 2009
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Si-containing block copolymers for self-assembled nanolithography
- - C.A. Ross
  - Y.S. Jung
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Fluorinated diamondlike carbon templates for high resolution nanoimprint lithography
- - M. Schvartzman
  - A. Mathur
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Formation and stability of NiSi in the presence of Co and Fe alloying elements
- - D. Deduytsche
  - C. Detavernier
  - et al.
- 2008
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures