Publications

101 results at Proceedings of SPIE - The International Society for Optical Engineering

Fabrication of dual damascene BEOL structures using a multi-level multiple exposure (MLME) scheme - Part 2. RIE-based pattern transfer and completion of dual damascene process yielding an electrically functional via chain
- - Stefan Harrer
  - John C Arnold
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Process characterization of pitch-split resist materials for application at 16nm node
- - Steven J. Holmes
  - Cherry Tang
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
High contact angle fluorosulfonamide-based materials for immersion lithography
- - Daniel P. Sanders
  - Linda K. Sundberg
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
Lasing from defect states in mixed-order organic laser structures
- - K. Baumann
  - Gabriele Raino
  - et al.
- 2010
- Proceedings of SPIE - The International Society for Optical Engineering 2010
The effect of photoresist/topcoat properties on defect formation in immersion lithography
- - G.M. Wallraff
  - Carl E. Larson
  - et al.
- 2007
- Proceedings of SPIE 2007
The role of copper-phthalocyanine in multilayer organic LEDs based on small molecules
- - Heike Riel
  - Tilman A. Beierlein
  - et al.
- 2002
- Proceedings of SPIE 2002
Color document analysis
- - Chunghui Kuo
  - A. Ravishankar Rao
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Indexing technique for similarity matching in large video databases
- - Sanghyun Park
  - June-Suh Cho
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Stochastic language model for analyzing document physical layout
- - Tapas Kanungo
  - Song Mao
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering
Fabrication challenges for next generation devices: MEMS for RF wireless communications
- - David Seeger
  - Jennifer Lund
  - et al.
- 2002
- Proceedings of SPIE - The International Society for Optical Engineering