Free standing silicon as a compliant substrate for SiGe
- G.M. Cohen
- P.M. Mooney
- et al.
- 2003
- MRS Proceedings 2003
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Ion Beam Stabilization of FePt Nanoparticle Arrays for Magnetic Storage Media
- J.E.E. Baglin
- Shouheng Sun
- et al.
- 2003
- MRS Proceedings 2003
Flexible Magnetics: Magnetic Lithography and Fabrication of Magnetic Masks on Thin Plastic Substrates
- Z.Z. Bandić
- H. Xu
- et al.
- 2003
- MRS Proceedings 2003
The study of modified layers in SiCOH dielectrics using spectroscopic ellipsometry
- Marcus A. Worsley
- Stacey F. Bent
- et al.
- 2003
- MRS Proceedings 2003
Interfacial relationships in microelectronic devices
- Michael Lane
- Robert Rosenberg
- 2003
- MRS Proceedings 2003
Creating nanoporosity by selective extraction of porogens using supercritical carbon dioxide/cosolvent processes
- B. Lahlouh
- T. Rajagopalan
- et al.
- 2003
- MRS Proceedings 2003
Kinetics of agglomeration of NiSi and NiSi2 phase formation
- C. Detavernier
- A.S. Özcan
- et al.
- 2002
- MRS Proceedings 2002
A selective etching process for chemically inert high-k metal oxides
- Katherine L. Saenger
- Harald F. Okorn-Schmidt
- et al.
- 2002
- MRS Proceedings 2002
Resist requirements and limitations for nanoscale electron-beam patterning
- J. Alexander Liddle
- Gregg M. Gallatin
- et al.
- 2002
- MRS Proceedings 2002
Optical nanolithography using evanescent fields
- Richard J. Blaikie
- Sharee J. McNab
- et al.
- 2002
- MRS Proceedings 2002