Publications

358 results at Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Dynamics of gas-surface energy transfer: Inelastic scattering of NO from Ag(111)
- - C.T. Rettner
  - J. Kimman
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Surface characterization of clean polyimide films by high-resolution electron energy-loss spectroscopy
- - T.C. Clarke
  - C. Gregoire
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Reactive ion etching related Si surface residues and subsurface damage: Their relationship to fundamental etching mechanisms
- - Gottiieb S. Oehrlein
  - Young H. Lee
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Kinetics of high-temperature thermal decomposition of Si0 2 on Si(100)
- - M. Liehr
  - J.E. Lewis
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effects of Au film on the kinetics of platinum silicide formation
- - Jerng-Sik Song
  - Chin-An Chang
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract’ Integrated system for studies of thln-film chemical growth processes on silicon wafers
- - M. Liehr
  - S. Gates
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
X-ray photoelectron and infrared spectroscopy of microwave plasma etched polyimide surfaces
- - N.J. Chou
  - J. Paraszczak
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Summary Abstract: Observation of final-state screening in inverse photoemission from adsorbed xenon layers
- - B. Reihl
  - K.H. Frank
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Effect of energetic neutralized noble gas ions on the structure of ion beam sputtered thin metal films
- - E. Kay
  - F. Parmigiani
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Pyroelectric calorimeter for photothermal studies of thin films and adsorbates
- - Hans J. Coufal
  - Robert K. Grvgier
  - et al.
- 1987
- Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films