Publications

509 results at JES

Electrical and EPR Studies of Electrolytically Grown TiO2 (Rutile)
- - G.V. Chandrashekhar
  - R.S. Title
- 2019
- JES
The Formation of SiO₂ in an RF Generated Oxygen Plasma: II. The Pressure Range Above 10 mTorr
- - A. Ray
  - A. Reisman
- 2019
- JES
Plasma Oxide FET Devices
- - A. Ray
  - A. Reisman
- 2019
- JES
On Fitting Error Functions to Data
- - R. Ghez
  - M.B. Small
- 2019
- JES
Anomalous Etch Structures Using Ethylenediamine-Pyrocatechol-Water Based Etchants and Their Elimination
- - A. Reisman
  - M. Berkenblit
  - et al.
- 2019
- JES
An electron microscope investigation of the effect of phosphorous doping on the plasma etching of polycrystalline silicon
- - E.A. Irene
  - E. Tierney
  - et al.
- 2019
- JES
The Formation of SiO₂ in an RF Generated Oxygen Plasma: I. The Pressure Range Below 10 mTorr
- - A. Ray
  - A. Reisman
- 2019
- JES
Resolution Limits Of PMMA Resist for Exposure with 50 kV Electrons
- - Alec N. Broers
- 2019
- JES
Low Energy Ion Beam Etching
- - J.M.E. Harper
  - J.J. Cuomo
  - et al.
- 2019
- JES
One-Micron Polycide (WSI₂ on Poly-Si) MOSFET Technology
- - M.Y. Tsai
  - H.H. Chao
  - et al.
- 2019
- JES