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168 results at Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Critical impact of mask electromagnetic effects on optical proximity corrections performance for 45 nm and beyond
- - Jaione Tirapu Azpiroz
  - Alan E. Rosenbluth
  - et al.
- 2007
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Highly porous silicon membrane fabrication using polymer self-assembly
- - C.T. Black
  - K.W. Guarini
  - et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Super-self-aligned back-gatedouble-gate planar transistors: Novel fabrication approach
- - Hao Lin
  - Haitao Liu
  - et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
On the use of alloying elements for Cu interconnect applications
- - K. Barmak
  - C. Cabral
  - et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Templated germanium nanowire synthesis using oriented mesoporous organosilicate thin films
- - Hemanth Jagannathan
  - Michael Deal
  - et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Structural and magnetic behavior of transition metal doped InN grown by molecular beam epitaxy
- - R. Rajaram
  - A. Ney
  - et al.
- 2006
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Experimental optimization of the electron-beam proximity effect forward scattering parameter
- - M.J. Rooks
  - N. Belic
  - et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Numeric analysis of the role of liquid phase ultraviolet photochemistry in 193 nm immersion lithography
- - William Hinsberg
  - Frances Houle
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Chemical mapping of polymer photoresists by scanning transmission x-ray microscopy
- - Ligia Muntean
  - Romain Planques
  - et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Thin-film transformations and volatile products in the formation of nanoporous low- k polymethylsilsesquioxane-based dielectric
- - P. Lazzeri
  - L. Vanzetti
  - et al.
- 2005
- Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures