Publications

233 results at Proceedings of SPIE 1989

Aqueous developable, negative working resist made of chlorinated novolac resin
- - H. Hiraoka
  - A.M. Patlach
  - et al.
- 1989
- Proceedings of SPIE 1989
Novolac based deep-uv resists
- - Dennis R. McKean
  - Scott A. Macdonald
  - et al.
- 1989
- Proceedings of SPIE 1989
Critical issues in high density magnetic and optical data storage
- - Alan E. Bell
- 1989
- Proceedings of SPIE 1989
Practical characterization of 0.5 μm optical lithography
- - Donis G. Flagello
  - Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Using monolithic laser arrays for improved transmitter availability in com-puter data links
- - Richard J. S. Bates
- 1989
- Proceedings of SPIE 1989
Aqueous base developable deep uv resist systems based on novel monomeric and polymeric dissolution inhibitors
- - Hiroshi Ito
- 1989
- Proceedings of SPIE 1989
Chemical and physical aspects of multilayer resist processing
- - J. Paraszczak
  - E. Babich
  - et al.
- 1989
- Proceedings of SPIE 1989
Bench evaluation of lithographic lenses from measurements of the point spread function
- - Norman Bobroff
  - Petra Fadi
  - et al.
- 1989
- Proceedings of SPIE 1989
Soft vacuum pulsed electron beam processing of teflon and teflon-like films
- - J. Krishnaswamy
  - G.J. Collins
  - et al.
- 1989
- Proceedings of SPIE 1989
Filters for soft x-ray solar telescopes
- - Eberhard Spiller
  - Kurt Grebe
  - et al.
- 1989
- Proceedings of SPIE 1989