Publications

9076 results for Computer Science

Gel resist processing for submicron CMOS and bipolar circuits
- - K.E. Petrillo
  - M. Smyth
  - et al.
- 1989
- Proceedings of SPIE 1989
Practical characterization of 0.5 μm optical lithography
- - Donis G. Flagello
  - Andrew T. S. Pomerene
- 1989
- Proceedings of SPIE 1989
Aqueous developable, negative working resist made of chlorinated novolac resin
- - H. Hiraoka
  - A.M. Patlach
  - et al.
- 1989
- Proceedings of SPIE 1989
Soft vacuum pulsed electron beam processing of teflon and teflon-like films
- - J. Krishnaswamy
  - G.J. Collins
  - et al.
- 1989
- Proceedings of SPIE 1989
Filters for soft x-ray solar telescopes
- - Eberhard Spiller
  - Kurt Grebe
  - et al.
- 1989
- Proceedings of SPIE 1989
A double crystal multilayer x-ray monochromator
- - L. Golub
  - A. Quillen
  - et al.
- 1989
- Proceedings of SPIE 1989
Enhancement of the reflectivity of multilayer x-ray mirrors by ion polishing
- - Eberhard Spiller
- 1989
- Proceedings of SPIE 1989
Modeling of optical alignment images for semiconductor structures
- - Chi-Min Yuan
  - Jerry Shaw
  - et al.
- 1989
- Proceedings of SPIE 1989
Imaging of liquid crystals using a tunneling microscope
- - J.S. Foster
  - J.E. Frommer
  - et al.
- 1989
- Proceedings of SPIE 1989
The P300: An approach to automated inspection of patterned wafers
- - Virginia Brecher
  - Raymond Bonner
  - et al.
- 1989
- Proceedings of SPIE 1989