Publications

2 results at IWJT 2010

Sub-20 nm abrupt USJ formation with long ms-flash with sub-2 nm dopant motion control
- - Kam-Leung Lee
  - Isaac Lauer
  - et al.
- 2010
- IWJT 2010
Advanced junction formation for Sub-32nm logic devices
- - Sadanand V. Deshpande
  - Ahmet Ozcan
  - et al.
- 2010
- IWJT 2010