Publications

3 results at ADMETA 2003

Moisture and oxygen uptake in Low K/ copper interconnect structures
- - T.M. Shaw
  - D. Jimerson
  - et al.
- 2003
- ADMETA 2003
Porous ILD process development for sub 100nm integration
- - K. Malone
  - S.T. Chen
  - et al.
- 2003
- ADMETA 2003
A 90nm dual damascene hybrid (organic / inorganic) low-k - Copper BEOL integration scheme
- - T. Dalton
  - A. Cowley
  - et al.
- 2003
- ADMETA 2003