Effect of elevated implant temperature on amorphization and activation in as-implanted silicon-on-insulator layers
- Katherine L. Saenger
- Stephen W. Bedell
- et al.
- 2008
- MRS Spring Meeting 2008
Publications
5 results at MRS Spring Meeting 2008
Extendibility study of a PVD Cu seed process with Ar+ Rf-Plasma enhanced coverage for 45nm interconnects
- Andrew H. Simon
- Tibor Bolom
- et al.
- 2008
- MRS Spring Meeting 2008
Crystallization characteristics of phase change nanoparticle arrays fabricated by self-assembly based lithography
- Yuan Zhang
- Simone Raoux
- et al.
- 2008
- MRS Spring Meeting 2008
Thickness-dependent crystallization behavior of phase change materials
- Simone Raoux
- Jean L. Jordan-Sweet
- et al.
- 2008
- MRS Spring Meeting 2008
SET characteristics of phase change bridge devices
- Daniel Krebs
- Simone Raoux
- et al.
- 2008
- MRS Spring Meeting 2008