Effects of environment on modulus of low-k porous films used in back end of line
- Eva E. Simonyi
- Christos D. Dimitrakopoulos
- et al.
- 2007
- MRS Spring Meeting 2007
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3 results at MRS Spring Meeting 2007
Application of scatterometry to BEOL measurements: Post Cu CMP measurements
- Deepak Kulkarni
- Shorn Ponoth
- et al.
- 2007
- MRS Spring Meeting 2007
Improved electromigration lifetime for copper interconnects using tantalum implant
- Jeff Gambino
- Timothy D. Sullivan
- et al.
- 2007
- MRS Spring Meeting 2007