Value-based management of design reuse
- Juan Antonio Carballo
- David L. Cohn
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
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4 results at SPIE Advanced Microelectronic Manufacturing 2003
Applications of image diagnostics to metrology quality assurance and process control
- John A. Allgair
- Victor V. Boksha
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Failure prediction across process window for robust OPC
- Shumay D. Shang
- Yuri Granik
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003
Layout Optimization at the pinnacle of Optical Lithography
- Lars Liebmann
- Greg Northrop
- et al.
- 2003
- SPIE Advanced Microelectronic Manufacturing 2003