An acid-based electroless Cu deposition process: Chemical formulation, film characteristics and CMP performance
- Wei-Tsu Tseng
- Chia-Hsien Lo
- et al.
- 2000
- ECS Meeting 2000
Publications
Date
Featured collections
Popular topics
3 results at ECS Meeting 2000
Experimental studies on electrodeposition of CoFe alloys
- Hong Xu
- Thomas E. Dinan
- et al.
- 2000
- ECS Meeting 2000
Sub-micron platinum electrodes by through-mask plating
- K.L. Saenger
- G. Costrini
- et al.
- 2000
- ECS Meeting 2000