Microfabrication by through-mask electrochemical micromachining
- Madhav Datta
- 1997
- SPIE Micromachining and Microfabrication 1997
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High aspect ratio etching in polymer for microactuator applications
- W.Y. Lee
- J. Gao
- et al.
- 1997
- SPIE Micromachining and Microfabrication 1997