Publications

3 results at TRANSDUCERS 1997

5 MHz, 2 N/m piezoresistive cantilevers with INCISIVE tips
- - R.P. Ried
  - H.J. Mamin
  - et al.
- 1997
- TRANSDUCERS 1997
Fabrication of ultrasensitive piezoresistive cantilevers for torque magnetometry
- - J. Brugger
  - M. Willemin
  - et al.
- 1997
- TRANSDUCERS 1997
High-yield wafer chuck for single-sided wet etching of MEMS structures
- - J. Brugger
  - G. Beljakovic
  - et al.
- 1997
- TRANSDUCERS 1997