Fabrication of grooved-glass substrates by phase-mask lithography
- P.J. Brock
- M. Levenson
- et al.
- 1991
- Microlithography 1991
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5 results at Microlithography 1991
Airborne chemical contamination of a chemically amplified resist
- Scott A. MacDonald
- N.J. Clecak
- et al.
- 1991
- Microlithography 1991
Optimization of optical properties of resist processes
- T.A. Brunner
- 1991
- Microlithography 1991
Mechanistic studies on the poly(4-tert-butoxycarbonyloxystyrene)/triphenylsulfonium salt photoinitiation process
- Nigel P. Hacker
- Kevin M. Welsh
- 1991
- Microlithography 1991
Negative chemical amplification resist systems based on polyhydroxystyrenes and N-substituted imides or aldehydes
- Hiroshi Ito
- Klaas Schildknegt
- et al.
- 1991
- Microlithography 1991