Publications

2 results at SPIE Processing Integration 1990

Experimental studies of oxygen incorporation during growth of Y-Ba-Cu-O films by pulsed laser deposition
- - A. Gupta
- 1990
- SPIE Processing Integration 1990
Etch tailoring through flexible end-point detection
- - D. Angell
  - G.S. Oehrlein
- 1990
- SPIE Processing Integration 1990