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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena- C.A. Chang
- L.L. Chang
- et al.
- 1984
- Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
- J. Paraszczak
- E. Babich
- et al.
- 1984
- Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
- Michael G. Rosenfield
- Douglas S. Goodman
- et al.
- 1984
- Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
- M.I. Nathan
- M. Heiblum
- et al.
- 1983
- Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena