Electrical study of DSA shrink process and CD rectification effect at sub-60nm using EUV test vehicle
- Cheng Chi
- Chi Chun Liu
- et al.
- 2017
- SPIE Advanced Lithography 2017
Kristin received her PhD in polymer physics from the University of Bayreuth, Germany and continued her career at the University of California, Santa Barbara, BASF and SLAC National Laboratory before joining IBM in 2014. Currently, Kristin is the strategy assistant for IBM Research's Accelerated Discovery Strategy with the goal to develop AI solutions to help scientific experts discover and invent faster. She is also leading the development of the Safer Materials Advisor, an AI-powered tool to identify concerning materials (e.g. PFAS) in product and processes and substitute them with safer alternatives.