William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Paper
Ab initio molecular dynamics simulation of liquids and solutions
Abstract
The application of ab initio molecular dynamics simulation to bulk molecular systems is reviewed with emphasis on the density functional treatment of intermolecular interactions. Examples discussed are water, hydrogen fluoride, benzene, and sulphuric acid.
Related
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
Heinz Schmid, Hans Biebuyck, et al.
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering