Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
We have studied 〈111〉 and 〈001〉 oriented Co(3 Å)/Pt(18 Å) superlattices grown by molecular beam epitaxy via X-ray diffraction using synchrotron radiation. The diffraction peak shapes, for the scattering vector Q parallel to the film planes, were found to be characteristically different between these two films. For the 〈111〉 oriented sample, this broadening is characterized by a Lorentzian peak shape with a positional correlation length of the order of 50 Å. The data further indicate that the atomic correlation in the 〈111〉 sample has a long range orientational but only short range positional order. © 1992 Springer-Verlag.
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Fernando Marianno, Wang Zhou, et al.
INFORMS 2021
Daniel J. Coady, Amanda C. Engler, et al.
ACS Macro Letters
Julian J. Hsieh
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films